A new method to fabricate low-loss chip-scale RF inductors
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[1] H. A. Wheeler. Simple Inductance Formulas for Radio Coils , 1928, Proceedings of the Institute of Radio Engineers.
[2] S. Pinel,et al. Very high-Q inductors using RF-MEMS technology for System-On-Package wireless communication integrated module , 2003, IEEE MTT-S International Microwave Symposium Digest, 2003.
[3] F. Ayazi,et al. High Performance Inductors on CMOS-Grade Trenched Silicon Substrate , 2008, IEEE Transactions on Components and Packaging Technologies.
[4] Hongrui Jiang,et al. On-chip spiral inductors suspended over deep copper-lined cavities , 2000 .
[5] K. Arai,et al. Sandwich type ferromagnetic RF integrated inductor , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).
[6] T. Lim,et al. Enhancement of Silicon-Based Inductor Q-Factor Using Polymer Cavity , 2012, IEEE Transactions on Components, Packaging and Manufacturing Technology.
[7] S. Couderc,et al. Bidirectional ferromagnetic spiral inductors using single deposition , 2005, IEEE Transactions on Magnetics.
[8] Shan X. Wang,et al. High-frequency microinductors with amorphous magnetic ground planes , 2002 .
[9] L.P.B. Katehi,et al. High performance micro-machined inductors on CMOS substrate , 2005, IEEE MTT-S International Microwave Symposium Digest, 2005..
[10] Hong Guo,et al. The influence of surface roughness on electrical conductance of thin Cu films: An ab initio study , 2008 .