A New Liner Stressor with Very High Intrinsic Stress (≫ 6 GPa) and Low Permittivity Comprising Diamond-Like Carbon (DLC) for Strained P-Channel Transistors
暂无分享,去创建一个
Ming Zhu | Tsung-Yang Liow | N. Balasubramanian | Wei-Wei Fang | Chih-Hang Tung | G.S. Samudra | Kian-Ming Tan | Mingchu Yang | R.T.P. Lee | Keat Mun Hoe | Yee-Chi Yeo
[1] J. Robertson,et al. Elastic constants of ultrathin diamond-like carbon films , 2000 .
[2] V. Moroz,et al. pMOSFET with 200% mobility enhancement induced by multiple stressors , 2006, IEEE Electron Device Letters.