In the last decade, new device concepts based on novel fabrication methods have emerged as a powerful and general class of supersensitive sensors for the direct detection of biological and chemical targets. Pushed by the opportunity to activate the physical-chemical phenomena at the nanoscale, novel patterning paradigms have gained nanofabrication accuracy accompanied by the fast development of bottom-up strategies. In this frenetic framework, the combination of some heterogeneous techniques-basically nano-imprint lithography, grafting of functional molecules, and synthesis of new ligands and probes to capture specific biological targets-have gained strong attention as enabling emerging technological mixture to fabricate ultra dense array of specialized sensors. Within the scope of this technological convergence, the paper is basically devoted to describe the processes involved in the production of stamps for nanoimprint lithography, the fabrication of printed array of silicon sensors on the micrometer and sub-micrometer resolution, the subsequent covalent biofunctionalization with single strand DNA and some preliminary electrical detection of the hybridization events via water modulating ac resistance. Among the possible choices, focus was given to planar functionalized capacitors for their intrinsic simple configuration and also because they appeared to be the most promising candidates for mass production in printed device architecture. The paper is based on original results but contains also data and achievements taken from the literature to make the discussion self-contained. © 2011 American Scientific Publishers.