论文信息 - Design and modeling of MEMS capacitive gyroscope

Design and modeling of MEMS capacitive gyroscope

The present papers deals with the designing of MEMS gyroscope for high driving resonance frequency and to study the effects of various structural parameters on the device performance. The design is based on comb capacitor configuration, which is excited by electrostatic force, sensing is based on transverse axis movement and is designed with 2μm thick polycrystalline silicon layer. The device is modeled for single DOF in accordance with standard SOI-MUMP's technology using MEMS Pro v5.1 simulation tool.

P. Gupta | P. Srivastava | P. Singh | R. K. Chaudhary

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