Methane as a novel doping precursor for deposition of highly conductive ZnO thin films by magnetron sputtering
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Y. Gomeniuk | R. Yatskiv | A. Nazarov | S. Prucnal | W. Skorupa | E. Bortchagovsky | A. Nikolenko | A. Vasin | A. Rusavsky | V. Strelchuk | S. Tiagulskyi