NOx sensing properties of In2O3 nanoparticles prepared by metal organic chemical vapor deposition

Abstract In 2 O 3 nanoparticles were deposited by low-temperature metal organic chemical vapor deposition. The response of 10-nm thick In 2 O 3 particle containing layers to NO x and O 2 gases is investigated. The lowest detectable NO x concentration is ∼200 ppb and the sensor performance is strongly dependent on the gas partial pressure as well as on the operating temperature. The sensor response towards 200 ppm of NO x is found to be above 10 4 . Furthermore, the cross-sensitivity against O 2 is very low, demonstrating that the In 2 O 3 nanoparticles are very suitable for the selective NO x detection.

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