Coplanar Waveguide Short Circuit with Finite Metallization Thickness

Coplanar waveguide is an interesting transmission line alternative for integrated circuits, especially MMICs, as there is no need for substrate thinning and for via holes. For high frequencies and high integration density, the circuit dimensions are becoming very small; therefore metallization thickness may play an increasing role. In this contribution, the end effect of a coplanar waveguide short circuit is investigated using the transverse resonance technique, taking into account the influence of finite metallization thickness.