论文信息 - Magnetic force microscopy/current contrast imaging: a new technique for internal current probing of ICs

Magnetic force microscopy/current contrast imaging: a new technique for internal current probing of ICs

Abstract This invited paper describes recently reported work on the application of magnetic force microscopy (MFM) to image currents in IC conductors [1]. A computer model for MFM imaging of IC currents and experimental results demonstrating the ability to determine current direction and magnitude with a resolution of ∽ 1 mA dc and ∽ 1 μA ac are presented. The physics of MFM signal generation and applications to current imaging and measurement are described.

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