Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control

This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanometre range with an atomic force microscope and the large range of motion of the NFM-100, structures can be analysed with high resolution and precision over large areas by combining the two systems, which was not possible before. On the basis of a grating sample, line scans over lengths in the millimetre range are demonstrated on the one hand; on the other hand, the accuracy as well as various evaluation methods are discussed and analysed.

[1]  John A. Nelder,et al.  A Simplex Method for Function Minimization , 1965, Comput. J..

[2]  Martin Meyer,et al.  Signalverarbeitung : analoge und digitale Signale, Systeme und Filter , 2021 .

[3]  G. B. nsch,et al.  Measurement of the refractive index of air and comparison with modified Edl?n's formulae , 1998 .

[4]  Theodore Vorburger,et al.  Three-dimensional image correction of tilted samples through coordinate transformation. , 2008, Scanning.

[5]  Walter C. Michels,et al.  A Pentode Lock‐In Amplifier of High Frequency Selectivity , 1941 .

[6]  H. Duan,et al.  Sub-10 nm fabrication: methods and applications , 2021, International Journal of Extreme Manufacturing.

[7]  G. Goertzel.  An Algorithm for the Evaluation of Finite Trigonometric Series , 1958 .

[8]  G. Binnig,et al.  Tunneling through a controllable vacuum gap , 1982 .

[9]  Eberhard Manske,et al.  The Metrological Basis and Operation of Nanopositioning and Nanomeasuring Machine NMM-1Metrologische Grundlagen und Wirkungsweise der Nanopositionier- und Messmaschine NMM-1 , 2009 .

[10]  Ivo W. Rangelow,et al.  Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication , 2017 .

[11]  Nicolas Bonod,et al.  Diffraction gratings: from principles to applications in high-intensity lasers , 2016 .

[12]  Eberhard Manske.  Nanofabrication in extended areas on the basis of nanopositioning and nanomeasuring machines , 2019, Advanced Lithography.

[13]  Yang Gan,et al.  Atomic and subnanometer resolution in ambient conditions by atomic force microscopy , 2009 .

[14]  G. Dai,et al.  Accurate and traceable calibration of two-dimensional gratings , 2007 .

[15]  Hendrik Rothe,et al.  Large AFM scans with a Nanometer Coordinate Measuring Machine , 2002, SPIE Optics + Photonics.

[16]  Ivo W. Rangelow,et al.  Scanning probe lithography approach for beyond CMOS devices , 2013, Advanced Lithography.

[17]  I. Rangelow,et al.  Scanning probe lithography on calixarene towards single-digit nanometer fabrication , 2020, International Journal of Extreme Manufacturing.

[18]  Stefan Sinzinger,et al.  Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas , 2021, Nanomanufacturing and Metrology.

[19]  Angela Duparré,et al.  Advanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002 Seattle, Washington, USA , 2002 .

[20]  Tino Hausotte,et al.  Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode / Im Tapping-Modus betriebenes Rasterkraftmikroskop mit einstellbarer Antastrichtung und piezoresistiven Cantilevern , 2019 .

[21]  Gerber,et al.  Atomic Force Microscope , 2020, Definitions.

[22]  C. Lenk,et al.  Low-energy electron exposure of ultrathin polymer films with scanning probe lithography , 2017 .

[24]  Jorge J. Moré,et al.  The Levenberg-Marquardt algo-rithm: Implementation and theory , 1977 .