Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
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P. Vettiger | M. Despont | L. Paratte | G.-A. Racine | N. F. de Rooij | L. Dellmann | M. Despont | P. Renaud | L. Paratte | N. D. de Rooij | P. Vettiger | L. Dellmann | H. Lorenz | S. Roth | C. Beuret | G. Racine | P. Renaud | C. Beuret | S. Roth | H. Lorenz
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