论文信息 - Electron beam induced deposition of low resistivity platinum from Pt(PF3)4a) - 字舞流文

Electron beam induced deposition of low resistivity platinum from Pt(PF3)4a)

A. Wickenden | M. Ervin | T. Brintlinger | J. Barry | J. Molstad | P. Hoffman | John Meingailis