Reversible High Capacity Si Nanocomposite Anodes Enabled By Molecular Layer Deposition

1 Department of Mechanical Engineering, University of Colorado at Boulder, Boulder, Colorado 80309, USA 2 National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, Colorado, 80401, USA 3 Department of Chemistry and Chemical Engineering, University of Colorado at Boulder, Boulder, Colorado 80309, USA 4 Department of Material Science and Engineering, Seoul National University, Seoul 151-742, South Korea