The role of hydrogen in the formation of microcrystalline silicon
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[1] S. Hamma,et al. Microcrystalline silicon growth on a-Si:H: effects of hydrogen , 1999 .
[2] Michel Bruel,et al. The History, Physics, and Applications of the Smart-Cut® Process , 1998 .
[3] S. Hamma,et al. In situ correlation between the optical and electrical properties of thin intrinsic and n-type microcrystalline silicon films , 1997 .
[4] M. Schadt,et al. Efficient second-harmonic generation in novel Cerenkov type nonlinear-optical polymer waveguides , 1997 .
[5] J. Andreu,et al. New features of the layer‐by‐layer deposition of microcrystalline silicon films revealed by spectroscopic ellipsometry and high resolution transmission electron microscopy , 1996 .
[6] Solomon,et al. Real-time spectroscopic ellipsometry study of the growth of amorphous and microcrystalline silicon thin films prepared by alternating silicon deposition and hydrogen plasma treatment. , 1995, Physical review. B, Condensed matter.
[7] Bernard Drevillon,et al. Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences , 1995 .
[8] P. Cabarrocas,et al. Role of mobile hydrogen in the amorphous silicon recrystallization , 1995 .
[9] B. Drévillon,et al. In-Situ Excimer Laser Induced Crystallization of Hydrogenated Amorphous Silicon Thin Films , 1994 .
[10] B. Drévillon,et al. Plasma deposition of microcrystalline silicon: the selective etching model , 1993 .
[11] Matthew F. Chisholm,et al. Optical functions of chemical vapor deposited thin‐film silicon determined by spectroscopic ellipsometry , 1993 .
[12] A. Matsuda,et al. Role of Hydrogen Atoms in the Formation Process of Hydrogenated Microcrystalline Silicon , 1990 .
[13] Chuang‐Chuang Tsai,et al. Control of silicon network structure in plasma deposition , 1989 .
[14] J. Hanna,et al. Growth of Amorphous and Crystalline Silicon by HR-CVD (Hydrogen Radical Enhanced CVD) , 1987 .
[15] G. Gruzalski,et al. Temperature dependence of positron annihilation at dislocations in Pb(Cd) , 1983 .
[16] S. Vepřek,et al. The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport , 1968 .
[17] D. A. G. Bruggeman. Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen , 1935 .