Analysis of the Plasma Properties Affected by Magnetic Confinement with Special Emphasis on Helicon Discharges

A one-dimensional radial non-uniform fluid model is employed to study plasma behaviors with special emphasis laid on helicon discharges. The plasma density ne, electron temperature Te, electron azimuthal and radial drift velocities are investigated in terms of the plasma radius rp, magnetic field intensity B0 and gas pressure p0, by assuming radial ambipolar diffusion and negligible ion cyclotron movement. The results show that the magnetic confinement plays an important role in the discharge equilibrium, especially at low pressure, which significantly reduces Te compared with the case of a negligible magnetic field effect, and higher B0 leads to a greater average plasma density. Te shows little variations in the plasma density range of 1011 cm−3–1013 cm−3 for p0 < 3.0 mTorr. Comparison of the simulation results with experiments suggests that the model can make reasonable predictions of Te in low pressure helicon discharges.