论文信息 - Fine structure of AlN∕AlGaN superlattice grown by pulsed atomic-layer epitaxy for dislocation filtering - 字舞流文

Fine structure of AlN∕AlGaN superlattice grown by pulsed atomic-layer epitaxy for dislocation filtering

M. Khan | J. Yang | Jian Ping Zhang | F. Ponce | J. Zhang | R. Liu | Wenhong Sun | H. Maruska