CMUT-based resonant gas sensor array for VOC detection with low operating voltage

Abstract With the anticipation for a more connected world through the Internet of Things, there is still a strong demand for miniaturized chemical sensors. Here, we report on a miniaturized resonant chemical sensor based on a Capacitive Micromachined Ultrasonic Transducer (CMUT) with a low operating voltage suitable for portable gas sensor applications. Previously reported CMUT chemical sensors required a DC operating voltage (16∼50 V) higher than the supply voltages of common circuits (e.g., 1.8–5 V). Thus, additional circuitry such as a charge pump circuit often was required as a part of the sensor interface circuits to supply the DC voltage to CMUT. This resulted in additional power consumption and a larger footprint. In this work, the vacuum gap of the CMUT which determines the operating voltage was reduced to 50 nm through the development of a double oxidation process with a high wafer-level yield. We achieved a significantly smaller pull-in voltage (

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