论文信息 - Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty

Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty

Performance evaluation and schedule optimization of cluster tools is challenging, especially when the process times are with uncertainty. In this paper, the critical path method (CPM) is used to analyze the throughput of multi-cluster tools with fixed action sequence. Slacks of non-critical path actions are studied and integrated to find the average cycle time of the cluster tool. A thin film tool from Novellus is used as an example to explain this methodology

Shengwei Ding | Jingang Yi | Raha Akhavan-Tabatabaei | Mike Tao Zhang

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