Kinetic Monte Carlo simulation of the growth of polycrystalline Cu films

[1]  C. Kittel.  Introduction to solid state physics , 1954 .

[2]  John A. Thornton,et al.  Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings , 1975 .

[3]  D. W. Bassett,et al.  Diffusion of single adatoms of platinum, iridium and gold on platinum surfaces , 1978 .

[4]  T. Halicioǧlu,et al.  A calculation of the diffusion energies for adatoms on surfaces of F.C.C. metals , 1979 .

[5]  A. Voter,et al.  Classically exact overlayer dynamics: Diffusion of rhodium clusters on Rh(100). , 1986, Physical review. B, Condensed matter.

[6]  Li,et al.  Epitaxial growth of a metastable modification of copper with body-centered-cubic structure. , 1987, Physical review. B, Condensed matter.

[7]  G. Thomas,et al.  Domain structure and microstructure of CoNi oblique incidence thin films , 1989 .

[8]  B. Sartwell.  Influence of ion beam activation on the mode of growth of Cu on Si(100) , 1989 .

[9]  T. Russell,et al.  X-ray and neutron reflectivity for the investigation of polymers , 1990 .

[10]  T. Shibata,et al.  Formation of Copper Thin Films by a Low Kinetic Energy Particle Process , 1991 .

[11]  J. B. Adams,et al.  EAM study of surface self-diffusion of single adatoms of fcc metals Ni, Cu, Al, Ag, Au, Pd, and Pt , 1991 .

[12]  D. E. Sanders,et al.  Predicted diffusion rates on fcc (001) metal surfaces for adsorbate/substrate combinations of Ni, Cu, Rh, Pd, Ag, Pt, Au , 1992 .

[13]  Mark Allen Weiss,et al.  Data structures and algorithm analysis in Ada , 1993 .

[14]  Tom J. Smy,et al.  Modelling and characterization of columnar growth in evaporated films , 1993 .

[15]  M. Naeem,et al.  Grain growth in copper films exposed to magnetically enhanced plasmas , 1995 .

[16]  M. E. Jones,et al.  Supersonic molecular beam scattering as a probe of thin film deposition processes , 1995 .

[17]  M. Ueda,et al.  Focused ion‐beam direct deposition of metal thin film , 1996 .

[18]  Scheffler,et al.  Ab initio calculations of energies and self-diffusion on flat and stepped surfaces of Al and their implications on crystal growth. , 1996, Physical review. B, Condensed matter.

[19]  M. J. Brett,et al.  Sculptured thin films and glancing angle deposition: Growth mechanics and applications , 1997 .

[20]  A. Voter.  A method for accelerating the molecular dynamics simulation of infrequent events , 1997 .

[21]  A. Voter.  Hyperdynamics: Accelerated Molecular Dynamics of Infrequent Events , 1997 .

[22]  Steven W Levine,et al.  A kinetic Monte Carlo study of the growth of Si on Si(100) at varying angles of incident deposition , 1998 .

[23]  R. Raj,et al.  Growth and structure of internal Cu/Al2O3 and Cu/Ti/Al2O3 interfaces , 1998 .

[24]  Kevin Robbie,et al.  Advanced techniques for glancing angle deposition , 1998 .

[25]  George H. Gilmer,et al.  An atomistic simulator for thin film deposition in three dimensions , 1998 .

[26]  Xiang-Yang Liu,et al.  Molecular dynamics-based ion-surface interaction models for ionized physical vapor deposition feature scale simulations , 1998 .

[27]  M. Milun,et al.  Growth, structure and properties of ultra-thin copper films on a V(110) surface , 1999 .

[28]  H. Onoda,et al.  Study of crystal orientation in Cu film on TiN layered structures , 1999 .

[29]  Steven W Levine,et al.  A simple model for the growth of polycrystalline Si using the kinetic Monte Carlo simulation , 2000 .