Micro and Mesoscale Robotic Assembly

Abstract Some of the challenges associated with Microsystems assembly are examined in this paper and illustrated with examples of ongoing research at the authors’ institution. One of the basic challenges in precision assembly is the need for very high accuracy over a large range of motion. This challenge is addressed through a “multiscale” approach, which involves the design of assembly tools and processes at multiple scales, and their integration into coherent system architectures. Parallelism is an important aspect of this architecture, with the goal of enabling high-throughput, fault-tolerant assembly at moderate cost. The modularity of the architecture is also important, given the need to frequently reconfigure microsystem assembly cells for small-batch production. This paper presents several concepts for the development of multiscale robotic tools for the assembly of microsystems. Numerical simulations and experimental results are used to illustrate the relevance of the proposed approaches. Extensions to manipulation at the nanoscale are briefly discussed. At the conclusion are some guidelines for the design of multiscale assembly systems.

[1]  R. Boudreau Foreword contributions from the 50th electronic components and technology conference , 2001 .

[2]  Arthur C. Sanderson,et al.  Micropeg manipulation with a compliant microgripper , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).

[3]  John T. Wen,et al.  Dynamic modeling and input shaping for MEMS , 2004 .

[4]  Michael A. Erdmann,et al.  An Exploration of Nonprehensile Two-Palm Manipulation , 1998, Int. J. Robotics Res..

[5]  Ramona Eberhardt,et al.  Automated assembly of microoptical components , 1998 .

[6]  Michael A. Erdmann,et al.  An Exploration of Nonprehensile Two-Palm Manipulation: Planning and Execution , 1996 .

[7]  Daniel E. Whitney,et al.  Quasi-Static Assembly of Compliantly Supported Rigid Parts , 1982 .

[8]  J. M. Noworolski,et al.  Microassembly technologies for MEMS , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[9]  Petar Pepeljugoski,et al.  Automated assembly of parallel fiber optic cables , 1997, 1997 Proceedings 47th Electronic Components and Technology Conference.

[10]  Ralph L. Hollis,et al.  Agile assembly architecture: an agent based approach to modular precision assembly systems , 1997, Proceedings of International Conference on Robotics and Automation.

[11]  Jean Serra,et al.  Image Analysis and Mathematical Morphology , 1983 .

[12]  Arthur C. Sanderson,et al.  Planning robotic manipulation strategies for workpieces that slide , 1988, IEEE J. Robotics Autom..

[13]  Jean-Paul Laumond,et al.  Algorithms for Robotic Motion and Manipulation , 1997 .

[14]  Warren P. Seering,et al.  Design and comparison of command shaping methods for controlling residual vibration , 1989, Proceedings, 1989 International Conference on Robotics and Automation.

[15]  N. C. MacDonald,et al.  DESIGN, FABRICATION, AND CHARACTERIZATION OF SINGLE CRYSTAL SILICON LATCHINGSNAP FASTENERS FOR MICRO ASSEMBLY , 1995 .

[16]  Masahiko Mikawa,et al.  Visual servoing for micro mass axis alignment device , 1996, Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems. IROS '96.

[17]  Soon Jang Automation manufacturing systems technology for opto-electronic device packaging , 2000, 2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070).

[18]  Ken Goldberg,et al.  MEMS fixtures for handling and assembly of microparts , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[19]  Robert J. Wood,et al.  PROTOTYPING MILLIROBOTS USING DEXTROUS MICROASSEMBLY AND FOLDING , 2000 .

[20]  Yves Bellouard,et al.  Microrobotics, Microdevices Based on Shape-Memory Alloys , 2002 .

[21]  Harry E. Stephanou,et al.  Micromanipulation using a friction force field , 2001, Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164).

[22]  Jean-Claude Latombe,et al.  Robot motion planning , 1970, The Kluwer international series in engineering and computer science.

[23]  Yu Zhou,et al.  Fusing force and vision feedback for micromanipulation , 1998, Proceedings. 1998 IEEE International Conference on Robotics and Automation (Cat. No.98CH36146).

[24]  R. K. Selli,et al.  Novel V-groove-based interconnect technology , 1998 .

[25]  Kevin M. Lynch Sensorless parts feeding with a one joint robot , 1996 .

[26]  M. Schwartz Encyclopedia of smart materials , 2002 .

[27]  K.-F. Bohringer,et al.  A theory of manipulation and control for microfabricated actuator arrays , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[28]  M. W. Beranek,et al.  Fiber-optic pigtail assembly and attachment alignment shift using a low-cost robotic platform , 2000, 2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070).

[29]  S. Kaneko,et al.  Novel fiber alignment method using a partially metal-coated fiber in a silicon V-groove , 2000, IEEE Photonics Technology Letters.

[30]  Jie Zou,et al.  Reconfigurable micro-assembly system for photonics applications , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[31]  Jason V. Clark,et al.  Addressing the needs of complex MEMS design , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[32]  M. D. Pocha,et al.  Automated fiber pigtailing technology , 1994, 1994 Proceedings. 44th Electronic Components and Technology Conference.

[33]  John F. Canny,et al.  A Computational Approach to Edge Detection , 1986, IEEE Transactions on Pattern Analysis and Machine Intelligence.

[34]  Christian Robl,et al.  Qualification of standard industrial robots for micro-assembly , 1999, Proceedings 1999 IEEE International Conference on Robotics and Automation (Cat. No.99CH36288C).

[35]  G. Boothroyd,et al.  Assembly Automation and Product Design , 1991 .

[36]  J. Hakkila,et al.  Comparison of active and passive fiber alignment techniques for multimode laser pigtailing , 2000, 2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070).

[37]  Dan O. Popa,et al.  An analysis of some fundamental problems in adaptive control of force and impedance behavior: theory and experiments , 1995, IEEE Trans. Robotics Autom..

[38]  Howie Choset,et al.  Discrete actuator array vectorfield design for distributed manipulation , 1999, Proceedings 1999 IEEE International Conference on Robotics and Automation (Cat. No.99CH36288C).

[39]  Dan Reznik,et al.  A flat rigid plate is a universal planar manipulator , 1998, Proceedings. 1998 IEEE International Conference on Robotics and Automation (Cat. No.98CH36146).

[40]  D. Marcuse Loss analysis of single-mode fiber splices , 1977, The Bell System Technical Journal.

[41]  Ken Goldberg,et al.  Sensorless Manipulation Using Transverse Vibrations of a Plate , 1995, Proceedings of 1995 IEEE International Conference on Robotics and Automation.

[42]  Ralph L. Hollis,et al.  Opportunities for Increased Intelligence and Autonomy in Robotic Systems for Manufacturing , 1998 .