Robotics for Electronics Manufacturing: Principles and Applications in Cleanroom Automation

[1]  Kevin L. Conrad,et al.  On the Accuracy, Repeatability, and Degree of Influence of Kinematics Parameters for Industrial Robots , 2002 .

[2]  Jean-Jacques E. Slotine,et al.  Robot analysis and control , 1988, Autom..

[3]  Karl Johan Åström,et al.  PID Controllers: Theory, Design, and Tuning , 1995 .

[4]  John Strong,et al.  Procedures in Experimental Physics , 1938 .

[5]  M. Aminpur,et al.  Process monitoring and surface characterization with in-line XPS metrology , 2007 .

[6]  R. Skalak,et al.  THE HISTORY OF POISEUILLE'S LAW , 1993 .

[7]  W. Thomson Theory of vibration with applications , 1965 .

[8]  Delbert Tesar,et al.  Classification structure and compliance modeling for serial manipulators , 2000, Proceedings 2000 ICRA. Millennium Conference. IEEE International Conference on Robotics and Automation. Symposia Proceedings (Cat. No.00CH37065).

[9]  D. M. Mattox,et al.  Handbook of physical vapor deposition (PVD) processing , 2010 .

[10]  Samad Hayati,et al.  Improving the absolute positioning accuracy of robot manipulators , 1985, J. Field Robotics.

[11]  M. Kanetomo,et al.  Wafer-transfer robot for use in ultrahigh vacuum , 1997 .

[12]  Bruno Siciliano,et al.  Modeling and Control of Robot Manipulators , 1995 .

[13]  Katsuhiko Ogata,et al.  Modern Control Engineering , 1970 .

[14]  Mark W. Spong,et al.  Robot dynamics and control , 1989 .

[15]  Athanasios Papoulis,et al.  Probability, Random Variables and Stochastic Processes , 1965 .

[16]  Carl Selinger Humor Dos and Don'ts , 2008, IEEE Spectrum.

[17]  John A. Crowe,et al.  Numerical double integration of acceleration measurements in noise , 2004 .

[18]  B. Halliday Cleaning materials and components for vacuum use , 1987 .

[19]  Hanqi Zhuang,et al.  Camera-aided robot calibration , 1996 .

[20]  Kevin L. Conrad,et al.  ROBOTIC CALIBRATION ISSUES: ACCURACY, REPEATABILITY AND CALIBRATION , 2000 .

[21]  F. Watanabe Mechanism of ultralow outgassing rates in pure copper and chromium–copper alloy vacuum chambers: Reexamination by the pressure-rise method , 2001 .

[22]  John J. Scialdone,et al.  Outgassing Data for Selecting Spacecraft Materials , 1993 .

[23]  Eduardo D. Sontag,et al.  Mathematical Control Theory: Deterministic Finite Dimensional Systems , 1990 .

[24]  Algirdas Pakstas,et al.  Computer networks in Estonia, Latvia, and Lithuania , 1993, Computer.

[25]  J. McIntyre Japan's Technical Standards: Implications for Global Trade and Competitiveness , 1997 .

[26]  John M. Hollerbach Kinematics and dynamics for control , 1989 .

[27]  Petre Stoica,et al.  Decentralized Control , 2018, The Control Systems Handbook.

[28]  Dinesh K. Pai,et al.  Forward Dynamics, Elimination Methods, and Formulation Stiffness in Robot Simulation , 1997, Int. J. Robotics Res..

[29]  Roy Featherstone,et al.  Rigid Body Dynamics Algorithms , 2007 .

[30]  Y. Sasaki Reducing SS 304∕316 hydrogen outgassing to 2×10−15torrl∕cm2s , 2007 .

[31]  C.M. Christensen,et al.  The New Economics of Semiconductor Manufacturing , 2008, IEEE Spectrum.

[32]  John J. Craig,et al.  Introduction to Robotics Mechanics and Control , 1986 .

[33]  R. Penrose A Generalized inverse for matrices , 1955 .

[34]  Robert P. Donovan,et al.  Contamination-Free Manufacturing for Semiconductors and Other Precision Products , 2001 .

[35]  Karl Mathia,et al.  Solutions of linear equations and a class of nonlinear equations using recurrent neural networks , 1996 .

[36]  Olaf Pfeiffer,et al.  Embedded Networking with CAN and CANopen , 2003 .

[37]  Dan Stoianovici,et al.  AcuBot: a robot for radiological interventions , 2003, IEEE Trans. Robotics Autom..

[38]  B S Halliday,et al.  Basic Vacuum Technology , 1989 .

[39]  Nicholas G. Dagalakis Industrial Robotics Standards , 2007 .

[40]  Benjamin C. Kuo,et al.  AUTOMATIC CONTROL SYSTEMS , 1962, Universum:Technical sciences.

[41]  Alan V. Oppenheim,et al.  Discrete-Time Signal Pro-cessing , 1989 .

[42]  Roger Clarke,et al.  Asimov's Laws of Robotics: Implications for Information Technology - Part 2 , 1993, Computer.