论文信息 - Atomic Layer Deposition of Gd-Doped HfO2 Thin Films - 字舞流文

Atomic Layer Deposition of Gd-Doped HfO2 Thin Films

E. Rosseel | J. Kittl | C. Adelmann | J. Swerts | H. Tielens | A. Hardy | M. Bael | D. Pierreux | S. Elshocht | D. Dewulf | X. Shi