Design of a high power MEMS relay with zero voltage switching and isolated power and signal transfer

This paper proposes a MEMS relay circuit by paralleling an auxiliary MOSFET with a MEMS switch. During the turn-on and turn-off transition, MOSFET is turned on at first to guarantee the switching voltage of MEMS switch is almost zero; for normal switch-on condition the MEMS switch with low on-resistance is turned on and the MOSFET is turned off. To meet the requirement of isolation between control side and power side, a transformer is designed in the control circuit and this single transformer achieves both power transfer and on-off control signal transfer. Thus the size of MEMS relay is reduced. Finally, a prototype was built and it validates the design of MEMS relay structure and single transformer circuit. Superior switching performance, fast response, low on-resistance and small size are achieved by the MEMS relay.

[1]  C. Keimel,et al.  Micro-Electromechanical-System (MEMS) based switches for power applications , 2011, 2011 IEEE Industrial and Commercial Power Systems Technical Conference.

[2]  B. Subba Reddy,et al.  A Novel Wide Duty Cycle Range Wide Band High Frequency Isolated Gate Driver for Power Converters , 2018, IEEE Transactions on Industry Applications.

[3]  Jun-Bo Yoon,et al.  A Highly Reliable MEMS Relay With Two-Step Spring System and Heat Sink Insulator for High-Power Switching Applications , 2016, Journal of Microelectromechanical Systems.

[4]  Sedigheh Veisi Mal Amiri,et al.  A new approach to optimal location of single-transformer sub-transmission substations using GIS analysis , 2017, 2017 Conference on Electrical Power Distribution Networks Conference (EPDC).

[5]  Marcus Conrad,et al.  Galvanically isolated driver using an integrated power- and signal-transformer , 2015, 2015 IEEE International Conference on Industrial Technology (ICIT).

[6]  C. Keimel,et al.  Microelectromechanical-Systems-Based Switches for Power Applications , 2012, IEEE Transactions on Industry Applications.

[7]  Xiaoguang Liu,et al.  Extension of the Hot-Switching Reliability of RF-MEMS Switches Using a Series Contact Protection Technique , 2016, IEEE Transactions on Microwave Theory and Techniques.

[8]  M. P. Boer,et al.  Impact of Contact Materials and Operating Conditions on Stability of Micromechanical Switches , 2013, Tribology Letters.

[9]  Xiaoguang Liu,et al.  High-Power High-Isolation RF-MEMS Switches With Enhanced Hot-Switching Reliability Using a Shunt Protection Technique , 2017, IEEE Transactions on Microwave Theory and Techniques.

[10]  Seung Won Choi,et al.  High-Efficiency Portable Welding Machine Based on Full-Bridge Converter With ISOP-Connected Single Transformer and Active Snubber , 2016, IEEE Transactions on Industrial Electronics.

[11]  Alexandre S. Martins,et al.  DC-DC and AC-DC voltage doubler boost converter for UPS applications , 2011, XI Brazilian Power Electronics Conference.

[12]  Chris Keimel,et al.  Advances In MEMS switches For RF test applications , 2016, 2016 11th European Microwave Integrated Circuits Conference (EuMIC).

[13]  V. Agrawal,et al.  A latching MEMS relay for DC and RF applications , 2004, Proceedings of the 50th IEEE Holm Conference on Electrical Contacts and the 22nd International Conference on Electrical Contacts Electrical Contacts, 2004..

[14]  Paulo C. V. Luz,et al.  A family of isolated integrated drivers with reduced capacitors for light system based on power LEDs , 2013, 2013 Brazilian Power Electronics Conference.

[15]  Yves Perriard,et al.  Electrostatically actuated MEMs relay for high power applications , 2016, 2016 19th International Conference on Electrical Machines and Systems (ICEMS).

[16]  C. Keimel,et al.  Emerging materials for microelectromechanical systems at elevated temperatures , 2014 .

[17]  Maria Dias Bellar,et al.  Modeling and control of the half-bridge voltage-doubler boost converter , 2003, ISIE 2003.