Three-axis piezoelectric vibration energy harvester

This paper reports for the first time a piezoelectric inertial harvester for scavenging vibrational energy in all three dimensions. The harvester is formed of optimized bulk-PZT/Si crab legs such that the first three resonance vibrational modes are in-plane and out-of-plane translational modes with closely-spaced frequencies (387-398 Hz). Partitioned electrodes on the PZT arms collect mechanical energy in the transverse (d31) piezoelectric mode, and have phase difference in their voltage outputs according to the axis of the applied vibration. The harvester is realized using a planar micro-fabrication method, with internal and packaged device volumes of 2.5 and 6.5 cm3, respectively. The device has generated 5-53 μW from 50 mg acceleration applied in in-plane and out-of-plane directions at the respective resonance frequencies, and has a half-power bandwidth of 8-16 Hz. The normalized power density (0.3-3.2 mW/cm3/g2) compares favorably with respect to previously reported multi-axis inertial energy harvesters.

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