论文信息 - Double-layer photonic devices based on transfer printing of silicon nanomembranes for three-dimensional photonics - 字舞流文

Double-layer photonic devices based on transfer printing of silicon nanomembranes for three-dimensional photonics

We present a novel platform for three dimensional (3D) photonics. A double layer 1×12 multimode interference (MMI) coupler is fabricated using transfer printing of silicon nanomembranes. Optical tests confirm low insertion loss and uniform outputs.

J. A. Rogers | A. Hosseini | R. T. Chen | Yang Zhang | A. Carlson | S. Y. Yang | D. Kwong

[1] Xiaochuan Xu,et al. 1× N Multimode Interference Beam Splitter Design Techniques for On-Chip Optical Interconnections , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[2] M. Sorel,et al. Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist , 2008 .

[3] J.A. Kash. IntraChip Optical Networks for a Future Supercomputer-on-a-Chip , 2007, 2007 Photonics in Switching.

[4] Dim-Lee Kwong,et al. Low Loss (~6.45dB/cm) Sub-Micron Polycrystalline Silicon Waveguide Integrated with Efficient SiON Waveguide Coupler , 2008 .

[5] Yonggang Huang,et al. Transfer printing by kinetic control of adhesion to an elastomeric stamp , 2006 .

[6] Ray T. Chen,et al. 1 X 12 even fanout using multimode interference optical beam splitter on silicon nanomembrane , 2010 .

[7] M. Lipson,et al. Deposited silicon high-speed integrated electro-optic modulator. , 2009, Optics express.