Study of crystalline thin films and nanofibers by means of the laser–plasma EUV-source based microscopy

Abstract New developments in nanoscience and nanotechnology require nanometer scale resolution imaging tools and techniques such as an extreme ultraviolet (EUV) and soft X-ray (SXR) microscopy, based on Fresnel zone plates. In this paper, we report on applications of a desk-top microscopy using a laser-plasma EUV source based on a gas-puff target for studies of morphology of thin silicon membranes coated with NaCl crystals and samples composed of ZnO nanofibers.

[1]  Weilun Chao,et al.  Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy. , 2009, Optics express.

[2]  Andrzej Bartnik,et al.  Compact laser plasma EUV source based on a gas puff target for metrology applications , 2005 .

[3]  J A Liddle,et al.  Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light. , 2006, Optics letters.

[4]  Andrzej Bartnik,et al.  “Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target , 2010 .

[5]  Andrzej Bartnik,et al.  A 50 nm spatial resolution EUV imaging-resolution dependence on object thickness and illumination bandwidth. , 2011, Optics express.

[6]  A. Ng,et al.  ZnO nanostructures for optoelectronics: Material properties and device applications , 2010 .

[7]  T. Kowalewski,et al.  Magnetic Fe doped ZnO nanofibers obtained by electrospinning , 2012, Journal of Sol-Gel Science and Technology.

[8]  M. Tlaczala,et al.  A novel electrospun ZnO nanofibers biosensor fabrication , 2011 .

[9]  Andrzej Bartnik,et al.  Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser-plasma EUV source. , 2010, Optics letters.

[10]  Andrzej Bartnik,et al.  A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength , 2010 .

[11]  J. Herron.  Thermochemical Data on Gas Phase Compounds of Sulfur, Fluorine, Oxygen, and Hydrogen Related to Pyrolysis and Oxidation of Sulfur Hexafluoride , 1987 .

[12]  D. Attwood.  Soft X-Rays and Extreme Ultraviolet Radiation , 1999 .