论文信息 - Active Compensation of the Deformation of a Magnetically Levitated Mover of a Planar Motor - 字舞流文

Active Compensation of the Deformation of a Magnetically Levitated Mover of a Planar Motor

P. Van den Hof | R. Tóth | J. Jansen | E. Lomonova | C. Custers | I. Proimadis | H. Butler | P. V. D. Van den Hof