Multiple wavelength fringe analysis for surface profile measurements

Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been successfully used to extend the unambiguous step height measurement rage of single wavelength interferometer. The use of RGB CCD camera allows simultaneous acquisition of fringes generated at different wavelengths. In this work, we discuss details about the fringe analysis of white light interferograms acquired using colour CCD camera. The colour image acquired using RGB camera is decomposed in to red, green, blue components and corresponding interference phase is measured using phase evaluation algorithms. The approach makes the 3D surface measurements faster, cost-effective for industrial applications.

[1]  Johannes Schwider,et al.  Red-green-blue interferometer for the metrology of discontinuous structures. , 2003, Applied optics.

[2]  Zhe Wu,et al.  Super-resolution coherent anti-Stokes Raman scattering microscopy with photonic nanojets. , 2014, Optics express.

[3]  Katsuichi Kitagawa.  Fast Surface Profiling by Multi-Wavelength Single-Shot Interferometry , 2010 .

[4]  Anand Asundi,et al.  Deformation and shape measurement using multiple wavelength microscopic TV holography , 2009 .

[5]  Pascal Picart,et al.  Sensor influence in digital 3λ holographic interferometry , 2011 .

[6]  Manojit Pramanik,et al.  Measurement of large discontinuities using single white light interferogram. , 2014, Optics express.

[7]  Mahendra P. Kothiyal,et al.  Single frame digital fringe projection profilometry for 3-D surface shape measurement , 2013 .

[8]  Katsuichi Kitagawa.  Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction , 2012, J. Electronic Imaging.

[9]  Sanjit K Debnath,et al.  Experimental study of the phase-shift miscalibration error in phase-shifting interferometry: use of a spectrally resolved white-light interferometer. , 2007, Applied optics.

[10]  U. Sennhauser,et al.  Multiwavelength shearography for quantitative measurements of two-dimensional strain distributions. , 1999, Applied optics.

[11]  Paul Kumar Upputuri,et al.  Measurement of discontinuous surfaces using multiple-wavelength interferometry , 2009 .

[12]  Tsuyoshi Murata,et al.  {m , 1934, ACML.

[13]  Nandigana Krishna Mohan,et al.  Time-average TV holography for vibration fringe analysis. , 2009, Applied optics.

[14]  Paul Kumar Upputuri,et al.  White light interferometer with color CCD for 3D-surface profiling of microsystems , 2015 .

[15]  Paul Kumar Upputuri,et al.  Multi-colour microscopic interferometry for optical metrology and imaging applications , 2016 .

[16]  Meylí Valin Fernández,et al.  Development of Digital Holographic Microscopy by reflection for analysis of surface , 2018, Results in Physics.

[17]  M P Kothiyal,et al.  Microscopic TV shearography for characterization of microsystems. , 2009, Optics letters.

[18]  M. P. Kothiyal,et al.  Time average vibration fringe analysis using Hilbert transformation. , 2010, Applied optics.

[19]  Fengzhou Fang,et al.  Measurement of micro-V-groove dihedral using white light interferometry , 2016 .

[20]  Paul Kumar Upputuri,et al.  Circularly polarized coherent anti-Stokes Raman scattering microscopy. , 2013, Optics letters.

[21]  Dalip Singh Mehta,et al.  Quantitative phase imaging of human red blood cells using phase-shifting white light interference microscopy with colour fringe analysis , 2012 .

[22]  Paul Kumar Upputuri,et al.  Use of two wavelengths in microscopic TV holography for nondestructive testing , 2014 .

[23]  Mahendra P. Kothiyal,et al.  Red-Green-Blue wavelength interferometry and TV holography for surface metrology , 2011 .

[24]  Anand Asundi,et al.  Microscopic TV holography for MEMS deflection and 3-D surface profile characterization , 2008 .

[25]  K. Creath.  Phase-Shifting Speckle Interferometry , 1985, Optics & Photonics.

[26]  Mahendra P. Kothiyal,et al.  Microscopic TV Holography for Microsystems Metrology , 2011 .

[27]  Manojit Pramanik,et al.  Microsphere-aided Optical Microscopy and its Applications for Super-Resolution Imaging , 2017 .

[28]  Wang Haifeng,et al.  White light interferometry for surface profiling with a colour CCD , 2012 .

[29]  Mahendra P. Kothiyal,et al.  Two-wavelength micro-interferometry for 3-D surface profiling , 2009 .

[30]  Paul Kumar Upputuri,et al.  Chirped time-resolved CARS microscopy with square-pulse excitation. , 2014, Optics express.

[31]  Xiaoyuan He,et al.  Single-shot color fringe projection for three-dimensional shape measurement of objects with discontinuities. , 2012, Applied optics.

[32]  Mahendra P. Kothiyal,et al.  Comparative study of time average and stroboscopic illumination techniques for vibration fringe analysis , 2011 .

[33]  Mahendra P. Kothiyal,et al.  Characterization of micro-lenses based on single interferogram analysis using Hilbert transformation , 2011 .

[34]  J C Wyant,et al.  Phase shifter calibration in phase-shifting interferometry. , 1985, Applied optics.

[35]  Paul Kumar Upputuri,et al.  White light single-shot interferometry with colour CCD camera for optical inspection of microsystems , 2015, International Conference on Optical and Photonic Engineering.

[36]  R. Stephenson.  A and V , 1962, The British journal of ophthalmology.

[37]  Mahendra P. Kothiyal,et al.  Measurement of static and vibrating microsystems using microscopicTV holography , 2011 .

[38]  W. Marsden.  I and J , 2012 .

[39]  Mahendra P. Kothiyal,et al.  Microscopic TV sherography for microsystems characterization , 2009, Optical Engineering + Applications.

[40]  Leslie L. Deck,et al.  Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain , 1995 .

[41]  N. Krishna Mohan,et al.  Microscopic TV Holography and Interferometry for Surface Profiling and Vibration Amplitude Measurement in Microsystems , 2011 .

[42]  B. Maniscalco,et al.  Thin film thickness measurements using Scanning White Light Interferometry , 2014 .

[43]  M. P. Kothiyal,et al.  Multiple wavelength interferometry for surface profiling , 2008, Optical Engineering + Applications.

[44]  Qingming Luo,et al.  Dual-wavelength laser speckle imaging to simultaneously access blood flow, blood volume, and oxygenation using a color CCD camera. , 2013, Optics letters.