Simulation of room temperature thermionic emission from AlxGa1−xN negative electron affinity cathodes

A cathode consisting of AlxGa1−xN is theoretically investigated. Spatial variations of Al fraction are used to provide a structure which transports electrons from n-type GaN material to Al0.75Ga0.25N material which exhibits negative electron affinity. The simulations indicate the emitted electron current density corresponding to various applied fields. The results for structures in which a 75-nm-thick layer of compositionally graded AlxGa1−xN sits upon a 100-nm-thick layer of GaN indicate that at room temperature a thermionic emission current density on the order of 100 A/cm2 can be expected for an applied field of about 75 V/μm. These new results indicate that AlxGa1−xN compositionally graded cathodes should be useful for vacuum microelectronic devices.

[1]  W. Oldham,et al.  n-n Semiconductor heterojunctions , 1963 .

[2]  M. N. Yoder,et al.  Wide bandgap semiconductor materials and devices , 1996 .

[3]  R. Davis,et al.  Observation of a negative electron affinity for heteroepitaxial AlN on α(6H)-SiC(0001) , 1994 .

[4]  W. Wiegmann,et al.  New rectifying semiconductor structure by molecular beam epitaxy , 1980 .

[5]  Jerry Bernholc,et al.  Doping properties of C, Si, and Ge impurities in GaN and AlN , 1997 .

[6]  J.R. Hauser,et al.  A computer analysis of heterojunction and graded composition solar cells , 1977, IEEE Transactions on Electron Devices.

[7]  Robert F. Davis,et al.  UV photoemission study of heteroepitaxial AlGaN films grown on 6H-SiC , 1996 .

[8]  R. Davis,et al.  Thin films of aluminum nitride and aluminum gallium nitride for cold cathode applications , 1997 .

[9]  R. Davis,et al.  Negative electron affinity surfaces of aluminum nitride and diamond , 1996 .

[10]  V. Zhirnov,et al.  WIDE BAND GAP MATERIALS FOR FIELD EMISSION DEVICES , 1997 .

[11]  J. Shaw,et al.  Graded electron affinity electron source , 1996 .

[12]  J. Bernholc,et al.  Negative) Electron Affinity of AlN and AlGaN Alloys , 1995 .

[13]  R. Davis,et al.  Acceptor and donor doping of AlxGa1−xN thin film alloys grown on 6H-SiC(0001) substrates via metalorganic vapor phase epitaxy , 1998 .

[14]  J. Schetzina Growth and Properties of III-V Nitride Films, Quantum Well Structures and Integrated Heterostructure Devices , 1995 .