Fabrication of single crystal diamond microchannels for micro-electromechanical systems
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X. Hou | Jing-wen Zhang | W. Yanfeng | Fengnan Li | Hongxing Wang | Zongchen Liu | Jiao Fu | Xiaohui Chang | Xiaofan Zhang | Garuma Abdisa Denu | Dan Zhao | G. Shao | J. Wang | Wen-Jiang Wang | Ming Zhang | Tian-Fei Zhu