FRAM cell design with high immunity to fatigue and imprint for 0.5 /spl mu/m 3 V 1T1C 1M bit FRAM

A new FRAM cell design with high immunity to fatigue and imprint has been proposed to achieve a megabit class FRAM with 1T1C cell structure, which has been applied to a 1M bit FRAM operated from a 3 V supply with 1T1C cell structure, 0.5 /spl mu/m rule and 3 /spl mu/m/sup 2/ capacitor area. The simulation result and imprint data predict a lifetime improved 7 orders longer than the conventional scheme.