Fabrication of High-resolution Periodical Structures on Polymer Waveguides Using a Replication Process

This paper describes a procedure to replicate a polymeric wavelength filter. In this work, the grating structure on a polymer is fabricated first using holographic interferometry and micro-molding processes. The polymeric wavelength filters are produced by a two-step molding process where the master mold is first formed on a negative tone photoresist and subsequently transferred to a PDMS mold; following this step, the PDMS silicon rubber mold was used as a stamp to transfer the pattern of the polymeric wavelength filters onto a UV cure epoxy. Initial results show good pattern transfer in physical shape. At the Bragg wavelength, a transmission dip of -15.5 dB relative to the –3dB background insertion loss and a 3-dB-transmission bandwidth of ~6nm were obtained from the device. 利用一種複製技術在高分子波導上製作光柵結構 80

[1]  Holger Becker,et al.  Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[2]  Y. Shibata,et al.  Effect of sidelobes on demultiplexing characteristics of a grating-folded directional coupler demultiplexer , 1996, IEEE Photonics Technology Letters.

[3]  W. Chang,et al.  Fabrication of polymer waveguides by a replication method. , 2006, Applied optics.

[4]  Yoshito Shuto,et al.  Optical intensity modulation in a vertically stacked coupler incorporating electro‐optic polymer , 1993 .

[5]  Yanyi Huang,et al.  Polymeric multi-channel bandpass filters in phase-shifted Bragg waveguide gratings by direct electron beam writing. , 2004, Optics express.

[6]  George M. Whitesides,et al.  Demonstration of waveguide couplers fabricated using microtransfer molding , 1997 .

[7]  G. F. Lipscomb,et al.  Complementary optical tap fabricated in an electro‐optic polymer waveguide , 1991 .

[8]  Hans Peter Herzig,et al.  Simple technique for replication of micro-optical elements , 1998 .

[9]  A. Vonsovici,et al.  Effects of grating heights on highly efficient unibond SOI waveguide grating couplers , 2000, IEEE Photonics Technology Letters.

[10]  Jang-Joo Kim,et al.  Low-loss and thermally stable TE-mode selective polymer waveguide using photosensitive fluorinated polyimide , 2002, IEEE Photonics Technology Letters.

[11]  Y. Lo,et al.  Cascade self-induced holography: a new grating fabrication technology for DFB/DBR lasers and WDM laser arrays , 1996 .

[12]  Ki-Dong Lee,et al.  Tunable Polymeric Bragg Grating filter Using Nanoimprint Technique , 2006 .

[13]  L. Eldada,et al.  Integrated multichannel OADMs using polymer Bragg grating MZIs , 1998, IEEE Photonics Technology Letters.

[14]  B. Bae,et al.  Simple fabrication of diffraction gratings by two-beam interference method in highly photosensitive hybrid sol-gel films. , 2004, Optics express.

[15]  H. Nishihara,et al.  Electron-Beam Directly Written Micro Gratings For Integrated Optical Circuits , 1981, Optics & Photonics.

[16]  James T. Yardley,et al.  Laser-fabricated low-loss single-mode raised-rib waveguiding devices in polymers , 1996 .

[17]  Shigekuni Sasaki,et al.  Embedded channel polyimide waveguide fabrication by direct electron beam writing method , 1995 .