Distributed‐feedback dye laser integrated with a channel waveguide formed on silicon

Successful operation of an integrated optical distributed‐feedback (DFB) dye laser in which generated light is confined in a V‐groove optical channel waveguide is reported. Both the channel waveguide and second‐order diffraction grating for DFB operation are formed by anisotropic‐etching the silicon substrate. Polyurethane doped with rhodamine 110 dye is used for the laser waveguide region, while undoped polyurethane is used for channel waveguides. Use of an argon laser for pumping yields continuous output at λ=6430 A characterized by a very low threshold and a spectral width less than 2 A. The output wavelength is consistent with the grating period of 4150 A.

[1]  R. Finne,et al.  A Water‐Amine‐Complexing Agent System for Etching Silicon , 1967 .

[2]  H. Kogelnik,et al.  Coupled‐Wave Theory of Distributed Feedback Lasers , 1972 .

[3]  C. Chen,et al.  An integrated optical waveguide and charge-coupled-device image array , 1977, IEEE Journal of Quantum Electronics.

[4]  J. Boyd,et al.  Optical coupling from fibers to channel waveguides formed on silicon , 1978, IEEE Journal of Quantum Electronics.

[5]  H. Kogelnik,et al.  STIMULATED EMISSION IN A PERIODIC STRUCTURE , 1971 .

[6]  Amnon Yariv,et al.  Periodic structures for integrated optics , 1977 .

[7]  G. Marowsky,et al.  Experimental determination of cw dye laser parameters by loss variation , 1975 .

[8]  R. Ulrich,et al.  Solution-deposited thin films as passive and active light-guides. , 1972, Applied optics.

[9]  A. Matsuda,et al.  Preferential doping of rhodamine 6G in a polyurethane optical solid circuit , 1977 .

[10]  John C. C. Fan,et al.  Selective black absorbers using rf‐sputtered Cr2O3/Cr cermet films , 1977 .

[11]  D. L. Kendall On etching very narrow grooves in silicon , 1975 .

[12]  Susumu Namba,et al.  Laser oscillation in simple corrugated optical waveguide , 1974 .

[13]  P. Tien Light waves in thin films and integrated optics. , 1971, Applied optics.

[14]  D. Scifres,et al.  Highly collimated laser beams from electrically pumped SH GaAs/GaAlAs distributed−feedback lasers , 1975 .

[15]  C. Hu,et al.  Thin‐film dye laser with etched cavity , 1976 .