분사액적 크기조절이 가능한 디지털 미소분사기

We present two different types of digital microinjectors where the ejected droplet volume is controlled by 4-bit digital signals for applications to high-speed and high-resolution digital inkjet printing and biochemical material dispensing. The first type, having 4 microhearters per nozzle, is suitable for side-shooting applications, while the second type, having single microheater, is intended for top-shooting applications. The structure, principle, fabrication process and test results of the two types of digital microinjectors are presented with the comparison of their performance characteristics.