A temperature compensation algorithm of piezoresistive pressure sensor and software implementation

The thermal zero drift and thermal sensitivity drift of piezoresistive pressure sensor plays a great role in the total error, so how to make this kind of error get effective compensation is significant for its performance. It is an effective method that establishing high-order temperature compensation model for silicon piezoresistive sensors and compensating temperature error, and put forward a fitting coefficient adjustment method on this model basis. The paper has been realized the calculation of temperature compensation by Matlab GUI. Experimental results show that nonlinearity error is less than 0.4% F.S.

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