论文信息 - C Redistribution during Ni Silicide Formation on Si1 − y C y Epitaxial Layers - 字舞流文

C Redistribution during Ni Silicide Formation on Si1 − y C y Epitaxial Layers

M. D. Lei | Sheng-wei Lee | C. Lai | H. Hsu | C. M. Wu | C. Nieh | S. Huang | W. Tsai | P. Tsai | C. Lo | M. Wang