A novel temperature-insensitive optical fiber pressure sensor for harsh environments

A novel diaphragm-based miniature optical fiber pressure sensor has been shown to work at temperatures up to 700/spl deg/C with a sensitivity of 2.93 nm/psi and a resolution of 0.01 psi (68.9 Pa). A passive temperature compensation scheme was used to reduce the temperature dependence to 0.0076 psi//spl deg/C (52.4 Pa//spl deg/C). The sensor exhibited a linear response in the available testing range from 0 to 200 psi (1.38 MPa), and being composed entirely of fused silica, the sensor's structure is very reliable, corrosion resistant, and immune to electromagnetic interference.