Tunable band-pass filters using Mems switches

In this paper, fully monolithic tunable millimeter-wave filters with taped-line feedings are proposed using the CPW-based periodic structures with novel multiple-contact MEMS switches. Millimeter-wave band-pass were designed, fabricated, and tested. The cascaded CPW-based periodic structures, with band-pass intrinsic filtering characteristics, are reconfigured into a self-similar single unit cell by the operation of the novel multiple-contact MEMS switches with single actuation. The measured results of the reconfigurable band-pass filter at 11.2 to 29.1 GHz. The chip size of the band-pass filter is 3 mm × 2 mm.

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