Theoretical Analysis and Experimental Study of Material Removal Characteristics in Bonnet Tool Polishing Process

To achieve ultra-precision optical elements, this paper research on removal-function of bonnet tool polishing from the theoretical and experimental aspects. Firstly, based on the principle of bonnet tool polishing, we calculate the velocity distribution through the geometric relationship, the pressure distribution through finite element model. Then, according to Preston formula, the removal function model is built. Finally, experimental system of bonnet tool polishing is built to accomplish removal-function experiment. And the experimental result indicates that removal-function model is reliable.