Robustness and Reliability of Micromachined Scanning Mirrors
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Kam Y. Lau | Olav Solgaard | Matthew Hart | Richard S. Muller | Robert A. Conant | R. Muller | O. Solgaard | K. Lau | J. Nee | M. Hart | R. Conant | Cory Hall | Jocelyn Nee | Cory Hall
[1] Van Arsdell,et al. Subcritical crack growth in polysilicon MEMS , 1997 .
[2] Kam Y. Lau,et al. A raster-scanning full-motion video display using polysilicon micromachined mirrors , 2000 .
[3] D. M. Tanner,et al. The effect of humidity on the reliability of a surface micromachined microengine , 1999, 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296).
[4] R. Tkach,et al. Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnects , 1998, IEEE Photonics Technology Letters.
[5] S.B. Brown,et al. Materials reliability in MEMS devices , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[6] Kam Y. Lau,et al. Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning , 1998 .
[7] Jae-Youl Lee,et al. Measurement of thermal expansion coefficient of poly-Si using microgauge sensors , 1999, Smart Materials, Nano-, and Micro- Smart Systems.
[8] Yasumasa Okada,et al. Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K , 1984 .
[9] Li Fan,et al. Optical MEMS: Huge possibilities for lilliputian-sized devices , 1998 .