Tunable large free spectral range microring resonators in lithium niobate on insulator

Microring resonators are critical photonic components used in filtering, sensing and nonlinear applications. To date, the development of high performance microring resonators in LNOI has been limited by the sidewall angle, roughness and etch depth of fabricated rib waveguides. We present large free spectral range microring resonators patterned via electron beam lithography in high-index contrast Z-cut LNOI. Our microring resonators achieve an FSR greater than 5 nm for ring radius of 30 μm and a large 3 dB resonance bandwidth. We demonstrate 3 pm/V electro-optic tuning of a 70 μm-radius ring. This work will enable efficient on-chip filtering in LNOI and precede future, more complex, microring resonator networks and nonlinear field enhancement applications.

[1]  M. Wood,et al.  12.5 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes. , 2013, Optics express.

[2]  H. Thacker,et al.  25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning. , 2011, Optics express.

[3]  W. Sohler,et al.  Loss in low-finesse Ti:LiNbO3 optical waveguide resonators , 1985 .

[4]  Nicolas A. F. Jaeger,et al.  Grating-coupled silicon microring resonators , 2012 .

[5]  Caterina Ciminelli,et al.  High performance InP ring resonator for new generation monolithically integrated optical gyroscopes. , 2013, Optics express.

[6]  Mankei Tsang,et al.  Rib Microring Resonators in Lithium Niobate on Insulator , 2016, IEEE Photonics Technology Letters.

[7]  M. Lipson,et al.  Micrometer scale lithium niobate electro-optic modulators , 2017, 2017 Conference on Lasers and Electro-Optics (CLEO).

[8]  Alberto Peruzzo,et al.  Ultra-low loss photonic circuits in lithium niobate on insulator. , 2017, Optics express.

[9]  Michal Lipson,et al.  Harmonic generation in silicon nitride ring resonators. , 2010, Optics express.

[10]  V Van,et al.  All-optical time-division demultiplexing and spatial pulse routing with a GaAs/AlGaAs microring resonator. , 2002, Optics letters.

[11]  F. Xia,et al.  Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects. , 2007, Optics express.

[12]  C. Xiong,et al.  Optical frequency comb generation from aluminum nitride microring resonator. , 2013, Optics letters.

[13]  Daniele Rezzonico,et al.  Electro–optically tunable microring resonators in lithium niobate , 2007, 0705.2392.

[14]  T. Horikawa,et al.  50-Gb/s ring-resonator-based silicon modulator. , 2013, Optics express.

[15]  Valerio Pruneri,et al.  Micro‐structured integrated electro‐optic LiNbO3 modulators , 2009 .

[16]  Q. Lin,et al.  High-quality lithium niobate photonic crystal nanocavities , 2017, 1706.08904.

[17]  Michal Lipson,et al.  High Coupling Efficiency Etched Facet Tapers in Silicon Waveguides , 2014, IEEE Photonics Technology Letters.

[18]  Miao Yu,et al.  Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range. , 2016, Optics express.

[19]  Marko Loncar,et al.  Monolithic ultra-high-Q lithium niobate microring resonator , 2017, 1712.04479.

[20]  Chi Xiong,et al.  High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics. , 2012, Optics express.

[21]  Chi Xiong,et al.  Electrical tuning and switching of an optical frequency comb generated in aluminum nitride microring resonators. , 2014, Optics letters.

[22]  Qianfan Xu,et al.  Silicon microring resonators with 1.5-μm radius , 2008 .

[23]  Huiying Hu,et al.  Lithium niobate on insulator (LNOI) for micro‐photonic devices , 2012 .

[24]  Jinzhong Yu,et al.  High-speed silicon modulator based on cascaded microring resonators. , 2012, Optics express.

[25]  K. Vahala.  Optical microcavities , 2003, Nature.

[26]  L.J. Guo,et al.  Polymer microring resonators for biochemical sensing applications , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[27]  P. Dumon,et al.  Silicon microring resonators , 2012 .

[28]  Tymon Barwicz,et al.  Multistage high-order microring-resonator add-drop filters. , 2006, Optics letters.

[29]  Pascal Baldi,et al.  Soft proton exchange on periodically poled LiNbO3: A simple waveguide fabrication process for highly efficient nonlinear interactions , 2000 .

[30]  M. Fejer,et al.  Annealed proton-exchanged LiNbO(3) waveguides. , 1991, Optics letters.

[31]  A. P. Rambu,et al.  Analysis of High-Index Contrast Lithium Niobate Waveguides Fabricated by High Vacuum Proton Exchange , 2018, Journal of Lightwave Technology.

[32]  M. De Micheli,et al.  Crystallographic and Optical Properties of Z-Cut High Index Soft Proton Exchange (HISoPE) LiNbO3 Waveguides , 2016, Journal of Lightwave Technology.

[33]  C. Xiong,et al.  Second harmonic generation in phase matched aluminum nitride waveguides and micro-ring resonators , 2012 .

[34]  Andrew J. Mercante,et al.  Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth. , 2018, Optics express.

[35]  Michal Lipson,et al.  Nanophotonic lithium niobate electro-optic modulators. , 2017, Optics express.

[36]  M. Wood,et al.  Hybrid silicon and lithium niobate electro-optical ring modulator , 2014 .

[37]  R A Wilson,et al.  Wavelength conversion in GaAs micro-ring resonators. , 2000, Optics letters.

[38]  J. Veselka,et al.  Proton exchange for high‐index waveguides in LiNbO3 , 1982 .