Process Capability Improvement in a Student Run Integrated Circuit Factory

RIT has received a five year grant from IBM through an IBM Total Quality Management (TQM) Competition. Among the several projects funded by this grant is a project entitled "Six Sigma Process Capability in Student-Run IC Factory". RIT is in the flrst year of this project and is deeply involved in defining the process capability baseline from data collected for the past several years of student-run factory operation. The methodology to improve the quality of the student-run factory is described in detail. We have found that none of our processes are as good as a Three Sigma process and some are equivalent to One Simga or less. However, action plans for improving these processes have been implemented and improvements have been measured. The system can also be used to query the data base to extract data and calculate manufacturing parameters such as cycle time, moves per day, Cp, K, and Cpk. RIT is working with manufacturing managers and engineers at the IBM facility in East Fishkill, NY. IBM managers and engineers participate in project reviews and provide direction for the faculty at RIT. Project plans include defining the baseline, identifying statistical tools required to monitor the process quality, define an approach to six sigma, implement continuous improvement, teach six sigma methodology to undergraduate students and disseminate knowledge to other universities.

[1]  L. F. Fuller.  Implementation of a CIM system for semiconductor manufacturing at Rochester Institute of Technology , 1990, IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop.

[2]  Lynn Fuller,et al.  A cost analysis of operating a large integrated circuit laboratory at Rochester Institute of Technology , 1991, Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium.

[3]  Lynn Fuller,et al.  Polysilicon gate NMOS project for undergraduate laboratory , 1989, Proceedings., Eighth University/Government/Industry Microelectronics Symposium.

[4]  D. T. Price,et al.  A student-run IC factory at RIT , 1989, Proceedings., Eighth University/Government/Industry Microelectronics Symposium.

[5]  R. E. Pearson,et al.  A multitechnology test chip for university integrated circuit fabrication projects , 1989, Proceedings., Eighth University/Government/Industry Microelectronics Symposium.

[6]  Lynn Fuller,et al.  A joint industry-university CIM project for university microelectronics manufacturing , 1991, Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium.

[7]  L. F. Fuller,et al.  A framework for resource management , 1991, [1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

[8]  Lynn Fuller,et al.  Care and feeding of a university cleanroom facility , 1989, Proceedings., Eighth University/Government/Industry Microelectronics Symposium.