Reliability of submicron InGaAs/InP DHBT under thermal and electrical stresses

Abstract We report on the reliability of InGaAs/InP DHBT technology which has applications in very high-speed ICs (over 100 Gbits/s). This work presents the results of accelerated aging tests under thermal and electrical stresses performed on HBT up to 2000 h. Stress conditions consist in applying collector–emitter bias V CE from 1.3 to 2.7 V and collector current densities J C of 400 and 610 kA/cm 2 . The corresponding junction temperatures T J extends from 83 to 137 °C. The base current ideality factor η B increase and the current gain β decrease have revealed a degradation of the base–emitter junction. The normalized current gain β norm drop has occurred earlier for higher V CE and/or higher T J . A 20% decrease of β norm chosen as the failure criterion leads to an activation energy of 1.1 eV.

[1]  T. Zimmer,et al.  Trends in Submicrometer InP-Based HBT Architecture Targeting Thermal Management , 2011, IEEE Transactions on Electron Devices.

[2]  J. J. Liou Long-term base current instability: a major concern for AlGaAs/GaAs HBT reliability , 1998, 1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351).

[3]  Shoji Yamahata,et al.  Highly reliable InP-based HBTs with a ledge structure operating at high current density , 2007 .

[4]  François Marc,et al.  Investigation of the degradation mechanisms of InP/InGaAs DHBT under bias stress conditions to achieve electrical aging model for circuit design , 2011, Microelectron. Reliab..

[5]  Kevin Feng,et al.  Reliability of commercial InGaP/GaAs HBTs under high voltage operation , 2003, 25th Annual Technical Digest 2003. IEEE Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 2003..

[6]  Gabriel Charlet,et al.  InP DHBT circuits: From device physics to 40 Gb/s and 100 Gb/s transmission system experiments , 2009 .

[7]  O. Drisse,et al.  Submicron InP DHBT Technology for High-Speed High-Swing Mixed-Signal ICs , 2008, 2008 IEEE Compound Semiconductor Integrated Circuits Symposium.

[8]  François Marc,et al.  Preliminary results of storage accelerated aging test on InP/GaAsSb DHBT , 2010, IPRM 2011 - 23rd International Conference on Indium Phosphide and Related Materials.

[9]  K.T. Feng,et al.  Reliability of InGaP/GaAs HBT's under high current acceleration , 2001, GaAs IC Symposium. IEEE Gallium Arsenide Integrated Circuit Symposium. 23rd Annual Technical Digest 2001 (Cat. No.01CH37191).

[10]  Thomas Zimmer,et al.  A Transient Measurement Setup for Electro-thermal Characterisation for SiGe HBTs , 2005 .

[11]  N. Labat,et al.  Study of Failure Mechanisms in InP/GaAsSb/InP DHBT Under Bias and Thermal Stress , 2007, 2007 IEEE 19th International Conference on Indium Phosphide & Related Materials.

[12]  K. Kurishima,et al.  Reliability study on InP/InGaAs emitter-base junction for high-speed and low-power InP HBT , 2010, 2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM).