The MMST Future-Factory Vision

CHARACTERISTICS OF AN "MMST WAFER FAB" The Microelectronics Manufacturing Science and Technology (MMST) Program is an experiment into many aspects of advanced integrated-circuit manufacturing. The experiment has been guided by a vision of integrated factory/process control. The primary goal is the transformation of the factory into an ideal "programmable and simulatible machine," which can flexibly manufacture products on demand in a readily predictable, optimizable way. The MMST Program has developed rechnology applicable to the realization of this vision, and commercialization is underway. Texas Instruments is (1) licensing technologies as well as (2) directly bringing to market products based on the software technology.

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[2]  Robert R. Doering Trends in single-wafer processing , 1992, 1992 Symposium on VLSI Technology Digest of Technical Papers.