Reliability issues in advanced monolithic embedded high voltage CMOS technologies

"New" reliability issues can arise when integrating high-voltage CMOS onto an advanced CMOS technology platform. This papers discusses several issues, like the high-voltage gate oxide integrity, the transistor reliability and the low-k dielectrics in the back-end of the process, with the high voltage application kept in mind. Possible means of improvement are also discussed in this paper.

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