Validation of micromechanical systems

For a reliable function of micro-mechanical systems the behavior of the used gear wheels is of extreme importance. But up to now there is no general available method for quality assurance of them. In this paper an adoption of the tangential and radial composite inspection as defined in standards for macroscopic gear wheels to the special needs and boundary conditions in micro technology is proposed. It is based on an examination of the differing results if the same gear wheels are mated with varying angles of rotation. Additionally special test rigs are presented which are able to test micro gear wheels. Finally some exemplary results are shown.