论文信息 - Identification and Multivariable Iterative Learning Control of an RTP Process for Maximum Uniformity of Wafer Temperature - 字舞流文

Identification and Multivariable Iterative Learning Control of an RTP Process for Maximum Uniformity of Wafer Temperature

Moonki Cho | Yonghee Lee | Kwang S. Lee | Sangrae Joo

[1] Kwang Hee Lee,et al. PID Control of Poly-butadiene Latex(PBL) Reactor Based on Closed-loop Identification and Genetic Algorithm , 2003 .