The solid state opens new possibilities for the generation of high harmonics extending to the extreme ultraviolet. Additionally, an array of tools and techniques exists for straightforward fabrication of solid-state devices, with nanoscale precision. In this work, we explore new ways to control high-harmonic emission in semiconductors using nanofabrication. We measure high-harmonic emission from tailored silicon and zinc oxide targets, up to the ninth order of the fundamental driving frequency (corresponding to a wavelength of ∼225 nm). Morphology and local composition can each localize and enhance emission. We utilize this control to demonstrate prototype devices which simultaneously emit and focus harmonic radiation.
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