论文信息 - Deposition and microstructure of PVD TiNNbN multilayered coatings by combined reactive electron beam evaporation and DC sputtering - 字舞流文

Deposition and microstructure of PVD TiNNbN multilayered coatings by combined reactive electron beam evaporation and DC sputtering

M. Larsson | P. Hollman | S. Hogmark | Per Hedenqvist | L. Hultman | U. Wahlström | P. Hedenqvist