Pattern fidelity in nanoimprinted films using critical dimension small angle x-ray scattering
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Stella W. Pang | Eric K. Lin | Ronald L. Jones | Christopher L. Soles | Wenchuang Hu | Steven Weigand | Denis T. Keane | J. P. Quintana | Ronald M. Reano | D. Keane | C. Soles | J. Quintana | S. Weigand | W. Hu | S. Pang | R. Reano | E. Lin | Ronald Jones
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