Tunable Single Pixel MEMS Fabry-Perot Interferometer
暂无分享，去创建一个
Typically, MEMS Fabry Perot devices use electrostatic actuation to control mirror spacing and snap in is an issue. A thermally actuated device has been modeled in COMSOL that lifts the mirror through thermal expansion.
[1] L. Faraone,et al. Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers , 2008 .
[2] José Higino Correia,et al. Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range , 1999 .
[3] M. Kusko,et al. Tunable Fabry-Perot surface micromachined interferometer-experiments and modeling , 2005 .